Patent holdings for IPC class H01J 21/18

Total number of patents in this class: 8

10-year publication summary

1
1
1
0
0
0
0
0
2
0
2015 2016 2017 2018 2019 2020 2021 2022 2023 2024

Principal owners for this class

Owner
All patents
This class
Varian Semiconductor Equipment Associates, Inc.
1282
1
Tokyo Electron Limited
11599
1
Massachusetts Institute of Technology
9795
1
ColdQuanta, Inc., AKA ColdQuanta
142
1
AP Novelty Pte. Ltd.
1
1
Balakin, Andrey Vladimirovich
65
1
Balakin, Pavel Vladimirovich
65
1
Vacon Ltd.
2
1
Other owners 0